Fully automated 50 kV electron beam lithography with sub-20 nm overlay and high-throughput exposures is online and ready for users.
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UNM NANOFAB
Become a UNM NanoFab User
Start the process to gain access to UNM NanoFab cleanroom facilities, training resources, and fabrication equipment.
News & Updates
Integrated SEM analytics with professional-grade EBL (1.6 nm min beam size) enables write-and-verify workflows without sample transfer.
Hands-on alignment & process tips. Details coming soon.
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Research & Achievements
Breakthrough in Nanofabrication
Our latest publication explores cutting-edge semiconductor fabrication techniques that improve efficiency and reduce waste.
Advances in Cleanroom Safety
A new study from our facility outlines improved safety protocols that have been adopted across multiple research labs.
