Ask your UNM NanoFab Manager

Yes, you can after approval. Email your request along with a copy of the materials SDS to the cleanroom manager (Maya).

In most cases, yes, the photoresist is still good. Manufacturers often apply expiration dates well under a date when the photoresist might start exhibiting performance issues. Photoresist is often good for several years after the posted expiration date. The most common source of photoresist going “bad” is water condensation which is often the result of opening the photoresist bottle while cold; straight out of the refrigerator. To reduce this possibility, always allow the photoresist to warm to room temperature before pouring or opening the bottle to use at the spin bench. Ultimately, test the photoresist on a dummy sample if you are concerned.

Yes, you can. Both ball point and gel pens are acceptable in the cleanroom.

The UNM NanoFab staff or approved personnel are the only ones permitted to take visitors inside the cleanroom. This is due to safety and privacy precautions. Please get approval from the UNM NanoFab staff before taking any unauthorized person/persons inside the cleanroom.

Contact the cleanroom manager. They will provide you with an application form and detail additional requirements to work in the cleanroom.

Yes. Just be sure to reserve the tool for the entire duration of your run. Load your samples late afternoon and do your deposition the next morning. Leave the ion gauge OFF overnight. Turn ON the ion gauge the next morning for about 15 minutes before starting your deposition.

Time and other detours affect us all. Let’s give the current reservation holder 20 minutes to arrive. Consider contacting the reservation holder through email. Clicking on their reservation will bring up the usual popup window where you can find the users email address. Let’s make a reasonable effort.

Any cleanroom staff can assist you with your purchase.

It depends. For activities such as waiting for a vacuum pump down, or a temperature setpoint (CVD01) or cooldown, yes, you may step away from the tool or leave the cleanroom. Once you start your process, ie: evaporation or plasma (deposition or etch), you are required to remain with the tool.

FOM accounts are created as part of cleanroom orientation or training on tools outside the cleanroom. If we overlooked you, please contact the cleanroom manager.

Yes. Contact the cleanroom manager or technician. We can provide you with a web link.

The RF matching network can have trouble matching the load with some chemistries. Contact the cleanroom technician for suggested methods to get the reflected power down and your forward power back up.

We’ll handle this on a case by case basis. Please contact the cleanroom manager with your request.